| 料號 | 說明 | 加入詢價單 |
| 1133-124-01 | O-RING |  |
| 1133-125-01 | O-RING | |
| 1133-678-01 | RF cover inner c1 | |
| 1133-679-01 | RF cover inner c2 | |
| 1133-728-01 | IGS Gas palel overhaul (XP8 QCM 製程 SiO) | |
| 1139-860-01 | PCV Clamp | |
| 1160-029-01 | NW50 ROLLCAM GATE VAVLE ASSY | |
| 1162-853-01 | ASSY-RF COVER RC1 | |
| 1162-853-01R | RF cover RC1-CIP3 半月環 | |
| 1162-854-01 | ASSY-RF COVER RC2 | |
| 1170-006-01 | RF COVER/INNER A | |
| 1170-006-01R | RF cover RC2-CIP3 | |
| 1170-007-01 | RF COVER/INNER A RC2 | |
| 1170-007-01R | RF cover RC2-CIP3 | |
| 1170-624-01 | LINE-GAS-LS B | |
