| 料號 | 說明 | 加入詢價單 |
| MKS ASTeX ASTRON I AX7670-32 | REACTIVE GAS GENERATOR |  |
| AE 3156310-017A | AE RF power supply (RF generator) | |
| AMVG-1000ASM5 | match box | |
| R10S2013110506 | RF power switch | |
| 3NS420B-C003 | Kawasaki Robot | |
| 30D60E-A006 | Kawasaki Robot controller | |
| 201600-43-00005 | BROOKS Robot | |
| S01229C0009 | Aligner S0122 | |
| TAS300 | TDK Load Port | |
| 73065-00003C | Reactor PCB | |
| 73065-00037 | RPU interface board | |
| 03E02710-01 | Vpp/Vdc PCB (/直流偏壓) | |
