| 機台型號 | 說明 | 加入詢價單 |
| ASM PEALD XP8 (4DCM) | 4DCM PEALD |  |
| ASM Furnace A400 | POLY & NITRIDE &WET_OXYGEN & DRY-OXYGEN & HIGH TEMP. ANNEAL | |
| ASM Furnace A412 | POLY & NITRIDE &WET_OXYGEN & DRY-OXYGEN & HIGH TEMP. ANNEAL | |
| ASM EPITAXY E2000 & E2000 plus | ATM PROCESS & RP PROCESS | |
| ASM EPITAXY E3200 | ATM PROCESS & RP PROCESS | |
| ASM PEALD XP-5(4CH) | SiO process | |
