| 料號 | 說明 | 加入詢價單 |
| 1035-069-01 | O-RING/GAS IN LOWER(GAS IN BLOCK UPPER SIDE) |  |
| 1035-070-01 | O-RING/TRANSPORT TUBE | |
| 1035-602-01 | RC1 RF cover | |
| 1035-603-01 | RC2 RF cover | |
| 1038-208-01 | RF BAR MAIN/RC1 | |
| 1038-209-01 | RF BAR MAIN/RC2 | |
| 1038-808-01 | O-RING/SLOW PUMP VALVE BODY | |
| 1038-809-01 | O-RING/FAST PUMP VALVE BODY | |
| 1038-810-01 | O-RING, FAST PUMP VALVE | |
| 1040-037-01 | RF SHAFT-UPPER/5.0 | |
| 1043-850-01 | Pressure gauge cable | |
| 1051-602-01 | END-STOP/90DEG/PBI/U- CUTS/H3.5L19/W_EC | |
| 1051-602-02 | END-STOP/90DEG/PBI/U-CUTS/H3.5L19/W_EC | |
| 1054-049-01 | PLATE-PIN SET JIG | |
| 1061-258-01 | ASSY-SUSCEPTOR DRIVE | |
